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author:

Han, Guoqiang (Han, Guoqiang.) [1] (Scholars:韩国强) | Jiang, Zhuangde (Jiang, Zhuangde.) [2] | Jing, Weixuan (Jing, Weixuan.) [3] | Prewett, Philip D. (Prewett, Philip D..) [4] | Jiang, Kyle (Jiang, Kyle.) [5]

Indexed by:

CPCI-S EI Scopus SCIE

Abstract:

An atomic force microscopy image is a dilation of the specimen surface with the probe tip. Tips wear or are damaged as they are used. And AFM tip shape and position status make AFM images distorted. So it is necessary to characterize AFM tip shape and position parameters so as to reconstruct AFM images. A geometric model-based approach is presented to estimate AFM tip shape and position status by AFM images of test specimens and scanning electron microscope (SEM) images of AFM tip. In this model, the AFM tip is characterized by using a dynamic cone model. The geometric relationship between AFM tip and the sample structure is revealed in linewidth and profile measurement. The method can easily calculate the tip parameters including half-cone angle, installation angle, scanning tilting angle and curvature radius, and easily estimate the position status of AFM tip when AFM tip moves on the specimen. The results of linewidth and profile measurement are amended accurately through this approach.

Keyword:

Atomic Force Microscopy (AFM) Linewidth and Profile Measurement Scanning Electron Microscope (SEM) Tip Characterization

Community:

  • [ 1 ] [Han, Guoqiang]Fuzhou Univ, Sch Mech Engn & Automat, Fuzhou 350108, Fujian, Peoples R China
  • [ 2 ] [Han, Guoqiang]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 3 ] [Jiang, Zhuangde]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 4 ] [Jing, Weixuan]Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
  • [ 5 ] [Jiang, Zhuangde]Univ Birmingham, Sch Mech Engn, Birmingham B15 2TT, W Midlands, England
  • [ 6 ] [Prewett, Philip D.]Univ Birmingham, Sch Mech Engn, Birmingham B15 2TT, W Midlands, England
  • [ 7 ] [Jiang, Kyle]Univ Birmingham, Sch Mech Engn, Birmingham B15 2TT, W Midlands, England

Reprint 's Address:

  • 韩国强

    [Han, Guoqiang]Fuzhou Univ, Sch Mech Engn & Automat, Fuzhou 350108, Fujian, Peoples R China

Email:

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Source :

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

ISSN: 1533-4880

Year: 2011

Issue: 12

Volume: 11

Page: 11041-11044

1 . 5 6 3

JCR@2011

1 . 1 3 4

JCR@2019

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 6

SCOPUS Cited Count: 6

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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