Sensors　that　have　low　power　consumption,　high　scalability　and　the　ability　of　rapidly　detecting　multitudinous　external　stimulus　are　of　great　value　in　cyber-physical　interactive　applications.　Herein,　we　reported　the　fabrication　of　ferroelectric　barium　strontium　titanate　((Ba70Sr30)TiO3,　BST)　thin　films　on　silicon　substrates　by　magnetron　sputtering.　The　as-grown　BST　films　have　a　pure　perovskite　structure　and　exhibit　excellent　ferroelectric　characteristics,　such　as　a　remnant　polarization　of　2.4　μC/cm2,　a　ferro-to-paraelectric　(tetragonal-to-cubic)　phase　transition　temperature　of　31.2　°C,　and　a　broad　optical　bandgap　of　3.58　eV.　Capacitor-based　sensors　made　from　the　BST　films　have　shown　an　outstanding　average　sensitivity　of　0.10　mV·Pa−1　in　the　10–80　kPa　regime　and　work　extremely　steadily　over　1000　cycles.　More　importantly,　utilizing　the　Pockels　effect,　optical　manipulation　in　BST　can　be　also　realized　by　a　smaller　bias　and　its　electro-optic　coefficient　reff　is　estimated　to　be　83.5　pmV−1,　which　is　2.6　times　larger　than　in　the　current　standard　material　(LiNbO3)　for　electro-optical　devices.　Our　work　established　BST　thin　film　as　a　powerful　design　paradigm　toward　on-chip　integrations　with　diverse　electronics　into　sensors　via　CMOS-comparable　technique.　©　2022　by　the　authors.